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Alpha Engineering Solutions Pte. Ltd. : AMAT CMP Engineering Services
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200mm 8" Load Cup Refurbishment

In 2002, a Global 200mm CMP Upgrade Program was rolled out by Applied Materials.

Alpha's director, then still with Applied Materials, was tasked to proliferate the 200mm CMP Upgrade Program in Taiwan. He then travelled throughout Taiwan certifying Applied Materials Taiwan Field Service Engineers to perform these upgrades at their respective customer sites. One of the retrofits was the 200mm 8" Load Cup refurbishment process.

The 2 major causes of failure are :
  1. Water Leaks
  2. Unrepeatable mechanical motion

These problems will severely impact the system's ability to handle wafers reliably.

Applied Materials recommends the 200mm 8" Load Cup refurbishment activity as an annual affair to ensure that the assembly is in tip top condition. Depending on individual wafer fab's operational strategy, some wafer fabs still adhere to this schedule today, while others service the assembly upon failure.

Regular servicing of the 200mm 8" Load Cup also provides an opportunity for the assembly to undergo complete cleaning to rid itself of excess slurries or any other particle sources.

Today, Alpha Engineering Solutions Pte. Ltd. continues to provide reliable 200mm 8" Load Cup refurbishment to our customers based in Southeast Asia.

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