Applied Materials CMP Endpoint Systems
The In Situ Rate Monitor (ISRM) is the endpoint detection system developed by Applied Materials. The ISRM system detects the endpoint, and stops polishing, when the required amount of a polished film is removed.
These endpoint modules require regular servicing to ensure that they are kept in tip-top condition to accurately detect endpoint based on the pre-set process algorithms.
Alpha provides refurbishment services for the following endpoint modules :
0010-37866 ASSY, INT, ISRM MODULE, FULL SCAN
0010-37905 ASSEMBLY, ISCAN MODULE
0010-05002 ASSY, INT. ISRM MODULE
0010-04514 ASSY, INT, ISRM MODULE, FULL SCAN
These endpoint modules require regular servicing to ensure that they are kept in tip-top condition to accurately detect endpoint based on the pre-set process algorithms.
Alpha provides refurbishment services for the following endpoint modules :
0010-37866 ASSY, INT, ISRM MODULE, FULL SCAN
0010-37905 ASSEMBLY, ISCAN MODULE
0010-05002 ASSY, INT. ISRM MODULE
0010-04514 ASSY, INT, ISRM MODULE, FULL SCAN
0010-04514 ASSY, INT, ISRM MODULE, FULL SCAN
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0010-05002 ASSY, INT. ISRM MODULE
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0010-37866 ASSY, INT, ISRM MODULE, FULL SCAN
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0010-37905
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