AMAT CMP PRODUCTS & TECHNOLOGIES
If you work in the semiconductor industry dealing with complex pieces of capital equipment, one of your biggest concerns is maximising your machines' uptime and minimising your total cost of ownership.
Given these two complementary objectives, what do you do when it's time for repairs or machine maintenance? Do you order parts recommended by the original equipment manufacturer (OEM) or alternatives through a 3rd party dealer?
There may be good reasons to go the economical route, but don't make that decision lightly. We work with these product manufacturers to provide you with new parts for your equipment needs. We also like to give you 5 good reasons to stick with the OEM's recommendations :
1. Quality
2. Warranty & Support
3. System Compatibility
4. Reliable Distribution
5. Durability
You will find our partners' parts familiar on your Applied Materials CMP equipment.
Given these two complementary objectives, what do you do when it's time for repairs or machine maintenance? Do you order parts recommended by the original equipment manufacturer (OEM) or alternatives through a 3rd party dealer?
There may be good reasons to go the economical route, but don't make that decision lightly. We work with these product manufacturers to provide you with new parts for your equipment needs. We also like to give you 5 good reasons to stick with the OEM's recommendations :
1. Quality
2. Warranty & Support
3. System Compatibility
4. Reliable Distribution
5. Durability
You will find our partners' parts familiar on your Applied Materials CMP equipment.
Alpha Engineering Solutions Pte. Ltd. is the Authorised Distributor for leading brands of components found on Applied Materials CMP platforms.
Our Partners
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Kaijo's product is at the heart of AMAT Mirra Mesa, Reflexion and Reflexion LK cleaners, providing the megasonic bath effect in the Megasonics Module. Strategically placed at the bottom of the Megasonic inner tank is Kaijo's quartz plate with RF piezo transducers mounted on it.
CMP end users may identify them as 0190-25073 TRANSDUCER PLATE, 300MM 0190-07311 AMPLIFIER, MEGASONIC, 300 MM SYSTEM, NRTL COMPLIANT 0190-07312 AMPLIFIER, MEGASONIC, 200 MM SYSTEM, NRTL COMPLIANT 0190-77344 TRANSDUCER PLATE NO DRAIN OPTION 200MM MEGASONIC 0190-77349 TRANSDUCER PLATE, 300MM 0190-08582 800W RF GENERATOR, MEGASONIC CLEANER 300MM |
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A traditional slipring cannot match the superior benefits of a Mercotac electrical slipring.
Mercotac connectors are maintenance free, do not degrade the signal over time and last much longer than slip rings. Mercotac connectors transmit with near zero electrical noise thus the same connector can be used for power and signal transmission. Mercotac connectors typically last hundreds of millions of revolutions. Electrical conduction path is a liquid metal that is molecularly bonded to the contacts, creating a connection that is constant and unchanged for the life of the connector. CMP end users may identify them as 0140-16606 CABLE, SLIPRINGS 0720-02672 CONN 6COND ROTATING FEED THROUGH 0720-04020 CONN BOOT KIT, ROTARY |
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Orion Heat Exchanger are used on AMAT Mirra Mesa and Reflexion Megasonic modules.
The Megasonics module uses a heater controller to control a heat exchanger. The heat exchanger maintains optimum process temperature of the chemical solution at 60°C. CMP end users may identify them as 0190-07314 POWER SUPPLY, HEAT EXCHANGER, MEGASONIC, NRTL COMPLIANT 0190-10030 HEAT EXCHANGER, AL-GRAPHITE, WITH CONNECTOR, CLEANER MEGASONIC |
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Stober Planetary Gear Units are standard on AMAT CMP machines since 2003. Known for their precision for servo applications, they are designed with helical gearing and high torsional stiffness. Backlash as low as < 3 arcmin is typical performance of Stober gearheads. The compact nature of the design results in a robust solid shaft, short motor adapter length and easy and secure motor mounting.
CMP end users may identify them as 0240-43843 KIT, STOBER GEARBOX PLATEN DRIVE W/SST SHAFT, MIRRA 3970-00030 DRIVE REDUCER 10:1 GEAR HEAD 200 MM MIRRA SST 3970-00029 DRIVE RDCR 7:1 GEARHEAD FOR YASKAWA SGMG 3970-00019 DRIVE RDCR 4:1 GEARHEAD FOR SANYO-DENKI # P60B18750RXS00M |
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ZAYTRAN MAGNUM parallel grippers are universally applicable “out-of-the-box”. The use of third-generation ZAYTRAN technology and the selection of super tough, corrosive resistant materials allows the MAGNUM parallel grippers to efficiently serve day-to-day as well as tough, nearly impossible parallel gripper applications. ZAYTRAN MAGNUM parallel grippers are commonly used in AMAT CMP 200mm Mesa cleaners, and 300mm Reflexion cleaners.
CMP end users may identify them as 3920-00244 TOOL GRIPPER 103N @ 100PSI, DRIVE SIDE BRUSH MODULE 3920-00245 TOOL GRIPPER 103N @ 100PSI, FLOW THRU SIDE BRUSH MODULE |
