AMAT Rotary Union Repairs
0760-01020 CPLG UNION ROTARY 3PORT
|
0760-01037 CPLG UNION ROTARY 4-PORT
|
Applied Materials CMP uses Rotary Unions designed and built by Deublin. They are precision mechanical devices used to transfer fluid from a stationary source into a rotating piece of machinery. Rotary Unions are used on AMAT CMP equipment to transfer pneumatic power.
When controlling Titan heads on AMAT Mirra CMP platforms, 3 or 4-port rotary unions are commonly used.
3-Port Rotary Union : AMAT P/N - 0760-01020; AMAT DESCRIPTION - CPLG UNION ROTARY 3PORT
4-Port Rotary Union : AMAT P/N - 0760-01037; AMAT DESCRIPTION - CPLG UNION ROTARY 4-PORT
Many users only replace the rotary union during a catastrophic failure, i.e. failure to perform wafer loads at the HCLU. However, there are many subtle signs that a rotary union is due for servicing.
Common Failure Symptoms of Rotary Unions
In catastrophic situations, rotary unions will impact hardware reliability. However, the health of rotary unions will also have negative impact on process reliability. Unfortunately, it may be more difficult to correlate the deterioration of the rotary unions' health to poor process performance on the AMAT CMP platform.
Alpha recommends that rotary unions undergo an annual preventive maintenance to ensure that the hardware is still in a high level of precision.
Repair Service
Alpha Engineering Solutions offers repair service for rebuilding Dublin Rotating Unions. Repaired Rotating Unions are warrantied to be free from defects in material and workmanship for one year from the date of shipment.
Success Criteria for Rotary Unions Serviced by Alpha
Common Mistakes During Rebuilding Of Rotary Unions
Alpha's Prices for Rotary Unions Repairs
When controlling Titan heads on AMAT Mirra CMP platforms, 3 or 4-port rotary unions are commonly used.
3-Port Rotary Union : AMAT P/N - 0760-01020; AMAT DESCRIPTION - CPLG UNION ROTARY 3PORT
4-Port Rotary Union : AMAT P/N - 0760-01037; AMAT DESCRIPTION - CPLG UNION ROTARY 4-PORT
Many users only replace the rotary union during a catastrophic failure, i.e. failure to perform wafer loads at the HCLU. However, there are many subtle signs that a rotary union is due for servicing.
Common Failure Symptoms of Rotary Unions
- Failure to reliably sense wafer during wafer loading or wafer dechucking steps. When there is a significant leak in the rotary union, it may affect the reliability of wafer sensing after wafer transfer.
- Wafer slip-out errors. When there is a significant leak in the retaining ring zone, the system may not be able to maintain the required pressure to keep the wafer between the retaining ring.
- Premature failure of regulators or regulators working regularly to maintain the preset pressure requirements. The regulator will be in overdrive mode, working to ensure that the set point pressure is maintained.
In catastrophic situations, rotary unions will impact hardware reliability. However, the health of rotary unions will also have negative impact on process reliability. Unfortunately, it may be more difficult to correlate the deterioration of the rotary unions' health to poor process performance on the AMAT CMP platform.
Alpha recommends that rotary unions undergo an annual preventive maintenance to ensure that the hardware is still in a high level of precision.
Repair Service
Alpha Engineering Solutions offers repair service for rebuilding Dublin Rotating Unions. Repaired Rotating Unions are warrantied to be free from defects in material and workmanship for one year from the date of shipment.
Success Criteria for Rotary Unions Serviced by Alpha
- Every passage within the rotary union needs to be certified to have a leak rate of less than 0.1 psi per minute.
Common Mistakes During Rebuilding Of Rotary Unions
- Not changing all o-rings in the assembly.
- Using lubricants that do not eliminate or minimise airborne particle.
Alpha's Prices for Rotary Unions Repairs
- 0760-01020 CPLG UNION ROTARY 3PORT - US$500
- 0760-01037 CPLG UNION ROTARY 4-PORT - US$670