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Alpha Engineering Solutions Pte. Ltd. : AMAT CMP Engineering Services
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PREVENTIVE MAINTENACE


Trouble free operation of semiconductor equipment depends on regular, consistent maintenance. A preventive maintenance (PM) program reduces system downtime through regular inspection, removal, cleaning, and replacement of system components before a problem occurs.


All PMs are important - especially those that include parts replacement. A consumable change schedule is key to a successful PM routine because the frequency is DIRECTLY PROPORTIONAL to the site's use of the tool.


Alpha provides PM services for the following tools :


ASYST SCOPE
ASYST WMS
KLA-TENCOR ASET F5X
KLA-TENCOR FLX5500
KLA-TENCOR UV1050
KLA-TENCOR UV1280

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