PREVENTIVE MAINTENACE
Trouble free operation of semiconductor equipment depends on regular, consistent maintenance. A preventive maintenance (PM) program reduces system downtime through regular inspection, removal, cleaning, and replacement of system components before a problem occurs.
All PMs are important - especially those that include parts replacement. A consumable change schedule is key to a successful PM routine because the frequency is DIRECTLY PROPORTIONAL to the site's use of the tool.
Alpha provides PM services for the following tools :
ASYST SCOPE
ASYST WMS
KLA-TENCOR ASET F5X
KLA-TENCOR FLX5500
KLA-TENCOR UV1050
KLA-TENCOR UV1280
All PMs are important - especially those that include parts replacement. A consumable change schedule is key to a successful PM routine because the frequency is DIRECTLY PROPORTIONAL to the site's use of the tool.
Alpha provides PM services for the following tools :
ASYST SCOPE
ASYST WMS
KLA-TENCOR ASET F5X
KLA-TENCOR FLX5500
KLA-TENCOR UV1050
KLA-TENCOR UV1280