Pneutronics PCB
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AMAT recommends CDA supply into the Mirra polisher to be maintained between 80 - 100 psi. It is not uncommon to notice some tools with maximum CDA pressure closer to the lower spectrum of this recommended range.
The inability to maintain a fairly high CDA pressure that may impact the reliability of wafer handling within the polisher and it increases the time for CDA pressures to settle at desired control settings. Unlike the Reflexion LK platform, the Mirra platform was created primarily using time-based controls versus event-based controls. As such, weaker CDA supply may cause wafer sensing false alarms on the Mirra platform.
An aged Pneutronics PCB Assembly may potentially be the contributing factor why the Mirra polisher bulkhead shows CDA pressures at the lower range. There are as many as 8 valves on each PCB assembly and thorough checks need to take place to ensure that there is no catastrophic leak arising from any of these pneumatic connections.
Success Criteria for Pneutronics PCB Assemblies Serviced by Alpha
On top of restoring valve control functionality, we also thoroughly check the assembly's ability to hold pressures. A successfully refurbished assembly should not have leak rate of more than 2 psi.
The inability to maintain a fairly high CDA pressure that may impact the reliability of wafer handling within the polisher and it increases the time for CDA pressures to settle at desired control settings. Unlike the Reflexion LK platform, the Mirra platform was created primarily using time-based controls versus event-based controls. As such, weaker CDA supply may cause wafer sensing false alarms on the Mirra platform.
An aged Pneutronics PCB Assembly may potentially be the contributing factor why the Mirra polisher bulkhead shows CDA pressures at the lower range. There are as many as 8 valves on each PCB assembly and thorough checks need to take place to ensure that there is no catastrophic leak arising from any of these pneumatic connections.
Success Criteria for Pneutronics PCB Assemblies Serviced by Alpha
On top of restoring valve control functionality, we also thoroughly check the assembly's ability to hold pressures. A successfully refurbished assembly should not have leak rate of more than 2 psi.