AMAT CMP SPARE PARTS
Spare Parts
Unplanned downtime disrupts production and directly affects the bottom line, but downtime can often be avoided or greatly minimised with an adequate spare parts inventory.
It is inevitable during the life of a system that there will be components that fail. Having a critical spare parts inventory can be the difference between downtime of a few minutes and downtime of hours to days.
Purchasing your spare parts from Alpha means having the full backing and commitment of our original product manufacturers. Our focus on making sure our customers have the lowest overall CoO means we have a constant focus on CIP with all manufacturers.
It is inevitable during the life of a system that there will be components that fail. Having a critical spare parts inventory can be the difference between downtime of a few minutes and downtime of hours to days.
Purchasing your spare parts from Alpha means having the full backing and commitment of our original product manufacturers. Our focus on making sure our customers have the lowest overall CoO means we have a constant focus on CIP with all manufacturers.
Parts used on Applied Materials (AMAT) CMP Platform
0010-04514 ASSY, INT, ISRM MODULE, FULL SCAN
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0010-05002 ASSY, INT. ISRM MODULE
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0010-23795 BRUSH MOUNT ASSY, Q.C. 4.3, FLOW THRU, BRUSH MODULE 200MM
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0010-23796 BRUSH MOUNT ASSY, Q.C. 4.3, DRIVE, BRUSH MODULE 200MM
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0010-30804 CRESCENT ASSY, VD, DESICA 300MM
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0010-37866 ASSY, INT, ISRM MODULE, FULL SCAN
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0010-37905 ASSEMBLY, ISCAN MODULE
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0010-77582 IDLER ASSEMBLY
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0015-77087 BALL SLEEVE
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0020-20673 PIN, CHAMBER, MONOLITH INTERFACE
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0020-79185 BEARING CLAMP, BASE ASSY
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0020-79187 INNER BEARING SPACER, BASE
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0020-79188 SPRING SPACER, BASE ASSY
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0020-79189 BEARING SPACER, BASE ASSY
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0040-77041 UPPER PLATEN LIQUID DE-CHUCK KIT
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0090-00559 DIW SPRAY BACK, SRD LDM, MESA CLEANER
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0090-00560 HARNESS SWITCH, FLOW, DIW SPRAY FRONT, SRD LDM MESA CLEANER
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0090-00732 HARNESS, BRUSH MODULE, WAFER PRESENT SWI
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0090-02703 BRUSH TORQUE AMP-FILTER ASSEMBLY
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0090-03242 BRUSH TORQUE AND WAFER ROT. MON
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0090-03592 SENSOR ASSY PAD CONDITIONER UP CMP REFLEXION LK
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0090-77026 ASSY, HCLU/PEDESTAL SENSO
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0090-77034 ASSY, SENSOR HOME LIMIT
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0090-77063 COVER INTERLOCK KEY SWITCH
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0090-77324 HARNESS, SWITCH, PRESSURE, BRUSH LDM, MESA CLEANER
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0090-77325 HARNESS, SWITCH, CHEM FLOW, BRUSH LDM
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0100-77035 ASSY PCB,ROBOT XTRACK
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0140-08233 HARNESS, CHEM FLOW SWITCH, DIRECT DELIVERY LDM
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0140-16606 CABLE, SLIPRINGS
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0140-77300 CABLE, HEAD SWEEP, WAFER LOSS
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0140-77633 C/A HD ROT1 MTR DRIVER
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0140-77634 C/A HD ROT2 MTR DRIVER
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0140-77635 C/A HD ROT3 MTR DRIVER
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0140-77636 C/A HD ROT4 MTR DRIVER
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0190-07311 AMPLIFIER, MEGASONIC, 300 MM SYSTEM, NTRL COMPLIANT
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0190-08582 800W RF GENERATOR, MEGASONIC CLEANER 300MM
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0190-08629 TWO VALVES INPUT MNFLD, SLURRY DELIVERY
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0190-10030 HEAT EXCHANGER, AL-GRAPHITE, WITH CONNEC
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0190-14828 ASSY BRUSH DRIVE MOTOR, BRUSH BOX, DESICA CLEANER
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0190-15759 SERVOMOTOR, PC SWEEP/WE, LK POLISHER
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0190-25073 TRANSDUCER PLATE, 300MM
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0190-25705 POWERWARE 5115 1U RM 1500VA 208VAC UPS
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0190-77016 PC.1./SWP INCREMENTAL ENCODER SERVOMOTOR
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0190-77182 SCRUBBER, SERVO MOTOR, BRUSH
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0190-77183 BEARING, BALL, .75IDX1.1875OD, UNOCOL UNILIF
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0190-77344 TRANSDUCER PLATE NO DRAIN OPTION 200MM MEGASONIC
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0190-77349 TRANSDUCER PLATE, 300MM
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0190-77395 MANIFOLD, BLEED VALVE, MEG LDM
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0240-31390 KIT, 200MM 8" LOAD CUP
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0240-43843 KIT, STOBER GEARBOX PLATEN DRIVE W/SST SHAFT, MIRRA
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0720-04020 CONN BOOT KIT, ROTARY
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0760-01020 CPLG UNION ROTARY 3PORT
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0760-01037 CPLG UNION ROTARY 4-PORT
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0690-01800 CLAMP, SPEED FLANGE
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0870-01008 DRVRSTPR MOTOR 2PH 24VDC OR 36VDC 1.6A 0.3-1.2AP
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0870-01010 DRVR SERVOPACK AC SGD 100W 200V FOR SPE
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0870-01013 DRVR STPR 5PHASE HI-SPEED TYPE UPK SERIES
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0910-01002 FUSE NON-DELAY 1.0A 250V TYPE 3AG
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0910-01007 FUSE SLO-BLO TIME-DELAY 3A 250V 1/4X1-1
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0910-01018 FUSE PICO 4A 125V AXIAL LEAD
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0910-01083 FUSE PICO 2A
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1080-01170 5KW SERVOMOTOR
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1080-00255 MOTOR SERVO AC 7.5KW 200V 2500RPM INCR ENCDR TYPE W/O BRAKE
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1080-00653 MOTOR SERVO AC 7.5W 200V 1500RPM INCR E
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1120-01065 OPT, LASER, 670 NM
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3080-01126 BELT TMG 8MMP X 36MMW
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3080-01151 BELT TMG 1/5P 1/4W 1700MML POLYURETHANE
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3700-02816 ORING ID 29.375 CSD .210 SPLICE-VITON 75DURO
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3780-01187 WAVE SPRING
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3800-00021 RGLTR ELECTRO-PNEU 15PSI 3/8MNPT 1-5VDC OUTPUT
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3880-01643 WSHRSEALING 3/8 .365ID X .666OD SST W/VITON SEAL
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3920-00244 TOOL GRIPPER 103N @ 100PSI, DRIVE SIDE BRUSH MODULE
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3920-00245 TOOL GRIPPER 103N @ 100PSI, FLOW THRU SIDE BRUSH MODULE
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3920-01213 TOOL WRENCH “L” SET BALLPOINT 13PCS .050-3/8”
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3920-01430 TOOLHEX KEY SET L-TYPE 1.5MM-10MM 9PC BALL END
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3920-01307 TOOL DIAL INDICATOR SET .125"RANGE .0005"DIV
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3970-00030 DRIVE REDUCER 10:1 GEAR HEAD 200 MM MIRRA SST