Applied Materials (AMAT) CMP
​Mirra System Refurbishment

Today's customers are sophisticated about the marketplace, well-informed about prices and quality and demanding in their expectations. Not only do they know more about the products they buy, but they also know it very quickly.

Alpha Engineering Solutions Pte. Ltd. knows this first-hand. We are proud to have delivered refurbished AMAT CMP equipment to the world's largest dedicated independent (pure-play) semiconductor foundry, TSMC.

On top of ensuring basic functionalities of the CMP system, system refurbishment activities may include the following :
  • 0010-26127 SPINDLE ASSY refurbishment
  • ​0190-14344 DRVR MEGATORQUE, AF8, W/IMPROVED IN-RUSH AND REGEN RESISTORS W/MOTOR refurbishment
  • 0760-01037 CPLG UNION ROTARY 4-PORT refurbishment
  • 3800-01147 RGLTR ELECTR-PNEU.14-7PST replacement
  • 3870-03073 VALVE ASSY SOL 3/2WAY 2MMORF 6106 W/2506-LED-PLUG replacement
  • 0010-25162 D-1 DDF3 PAD CONDITIONER refurbishment
  • 0240-43843 KIT, STOBER GEARBOX PLATEN DRIVE W/SST SHAFT, MIRRA refurbishment
  • 0010-05004 ASSY, FULL SCAN ISRM refurbishment
  • 1080-01170 5KW SERVOMOTOR refurbishment
  • 0190-17083 CROSS BEARING RB TYPE W/SEALS replacement
  • 0240-31390 KIT, 200MM 8" LOAD CUP refurbishment
  • 0010-24494 FLEX COUPLING ROBOT ARM refurbishment