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0010-03500 ASSY, TITAN I/II,E-CHAINFLEX

The cables within the e-chain assembly acts like the arteries of the AMAT Mirra polisher communication. The assembly comprises of the following harnesses :

1. 0140-78193 CABLE, TITAN II DIGITAL I/O

This harness controls all digital signals transmitted to the polishing heads, including the switching of pressure and vacuum controls to the polishing heads.

2. 0140-77631 C/A HD ROT1-4 MTR DRIVER RESOLVER

This harness controls the motor instructions to be transmitted to the head rotation motors.

3. 0140-77632 C/A HD SWP1-4 MTR DRIVER

This harness controls the motor instructions to be transmitted to the head sweep motors.

4. 0140-77633 C/A HD ROT1 MTR DRIVER

This harness controls the motor power to be transmitted to Head 1 rotation motor.

5. 0140-77634 C/A HD ROT2 MTR DRIVER

This harness controls the motor power to be transmitted to Head 2 rotation motor.

6. 0140-77635 C/A HD ROT3 MTR DRIVER

This harness controls the motor power to be transmitted to Head 3 rotation motor.

7. 0140-77636 C/A HD ROT4 MTR DRIVER

This harness controls the motor power to be transmitted to Head 4 rotation motor.

8. 0140-78314 ANALOG I/O HEAD, USER FLOW METERS, 200MM HARNESS

This harness controls all analog signals transmitted to the polishing heads, controlling the varying pressures required for different process recipes.

​Due to the constant rotation of the cross, either during wet idle or normal production mode, these 8 sets of harnesses are subject to constant torsional stress. After prolong usage, the torsional stress on these harnesses may cause the condition of these harnesses to deteriorate, resulting in broken connections. 


Alpha Engineering Solutions only use the best quality cables - cables rated for high load requirements, shielded, oil-resistant as well as flame-retardant to be used within the AMAT Mirra polisher.

Any one of these 8 cables failing prematurely on the system will result in loss of system uptime. As such, Alpha Engineering Solutions ensures that we stock at least 1 of each type of cables within our office premise to adequately support our customers in times of emergency.
0140-77631 C/A HD ROT1-4 MTR DRIVER RESOLVER
0140-77631 C/A HD ROT1-4 MTR DRIVER RESOLVER
0140-77633 C/A HD ROT1 MTR DRIVER
0140-77633 C/A HD ROT1 MTR DRIVER
0140-77635 C/A HD ROT3 MTR DRIVER
0140-77635 C/A HD ROT3 MTR DRIVER
0140-77636 C/A HD ROT4 MTR DRIVER
0140-77636 C/A HD ROT4 MTR DRIVER

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