Megasonic Cleaning
The first cleaning station in Applied Materials (AMAT) CMP cleaner is the megasonic module. Naturally, it is one of the most important step in determining the overall efficiency of the cleaning process.
Megasonic cleaning uses high frequency ultrasonic cleaning technology for precise cleaning in removing ultra fine particles.
High frequency megasonic cleaning is used to remove particles by acceleration to realise uniform cleaning with minimal damage to the cleaned surface.
In normal operating conditions, reflected power should be less than 10W. In an ideal situation, a RF generator should be matched directly to the transducer plate in use. If the RF generator holds 15W stability, there should be no change in cleaning performance.
Our customers expect no downtime to the AMAT CMP cleaner. Alpha understands the importance of efficient cleaning to the overall yield on the wafer, and provides replacement RF generators and transducer plates used on the Applied Materials (AMAT) CMP platforms to assist our customers maintain their machines in tip-top condition.
Parts used in Mesa cleaner only
0190-77344 TRANSDUCER PLATE NO DRAIN OPTION 200MM MEGASONIC
0190-07312 AMPLIFIER, MEGASONIC, 200 MM SYSTEM, NRTL COMPLIANT
Parts used in Reflexion and Reflexion LK cleaner
0190-25073 TRANSDUCER PLATE, 300MM
0190-77349 TRANSDUCER PLATE, 300MM - obsolete
Parts used in Reflexion cleaner only
0190-07311 AMPLIFIER, MEGASONIC, 300 MM SYSTEM, NRTL COMPLIANT
Parts used in Reflexion LK cleaner only
0190-08582 800W RF GENERATOR, MEGASONIC CLEANER 300MM
Megasonic cleaning uses high frequency ultrasonic cleaning technology for precise cleaning in removing ultra fine particles.
High frequency megasonic cleaning is used to remove particles by acceleration to realise uniform cleaning with minimal damage to the cleaned surface.
In normal operating conditions, reflected power should be less than 10W. In an ideal situation, a RF generator should be matched directly to the transducer plate in use. If the RF generator holds 15W stability, there should be no change in cleaning performance.
Our customers expect no downtime to the AMAT CMP cleaner. Alpha understands the importance of efficient cleaning to the overall yield on the wafer, and provides replacement RF generators and transducer plates used on the Applied Materials (AMAT) CMP platforms to assist our customers maintain their machines in tip-top condition.
Parts used in Mesa cleaner only
0190-77344 TRANSDUCER PLATE NO DRAIN OPTION 200MM MEGASONIC
0190-07312 AMPLIFIER, MEGASONIC, 200 MM SYSTEM, NRTL COMPLIANT
Parts used in Reflexion and Reflexion LK cleaner
0190-25073 TRANSDUCER PLATE, 300MM
0190-77349 TRANSDUCER PLATE, 300MM - obsolete
Parts used in Reflexion cleaner only
0190-07311 AMPLIFIER, MEGASONIC, 300 MM SYSTEM, NRTL COMPLIANT
Parts used in Reflexion LK cleaner only
0190-08582 800W RF GENERATOR, MEGASONIC CLEANER 300MM
0190-77344 TRANSDUCER PLATE NO DRAIN OPTION 200MM MEGASONIC
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0190-77349 TRANSDUCER PLATE, 300MM
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As part of continuous improvement, the 300mm transducer plate has been modified.
Two white squares were added to hold the wires for safer installation. |
0190-25073 TRANSDUCER PLATE, 300MM
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