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Alpha Engineering Solutions Pte. Ltd. : AMAT CMP Engineering Services
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Megasonic Cleaning

The first cleaning station in Applied Materials (AMAT) CMP cleaner is the megasonic module. Naturally, it is one of the most important step in determining the overall efficiency of the cleaning process. 

Megasonic cleaning uses high frequency ultrasonic cleaning technology for precise cleaning in removing ultra fine particles.

High frequency megasonic cleaning is used to remove particles by acceleration to realise uniform cleaning with minimal damage to the cleaned surface.

In normal operating conditions, reflected power should be less than 10W. In an ideal situation, a RF generator should be matched directly to the transducer plate in use. If the RF generator holds 15W stability, there should be no change in cleaning performance.

Our customers expect no downtime to the AMAT CMP cleaner. Alpha understands the importance of efficient cleaning to the overall yield on the wafer, and provides replacement RF generators and transducer plates used on the Applied Materials (AMAT) CMP platforms to assist our customers maintain their machines in tip-top condition.

Parts used in Mesa cleaner only
         
0190-77344 TRANSDUCER PLATE NO DRAIN OPTION 200MM MEGASONIC
0190-07312 AMPLIFIER, MEGASONIC, 200 MM SYSTEM, NRTL COMPLIANT

Parts used in Reflexion and Reflexion LK cleaner

0190-25073 TRANSDUCER PLATE, 300MM
0190-77349 TRANSDUCER PLATE, 300MM - obsolete


Parts used in Reflexion cleaner only

 0190-07311 AMPLIFIER, MEGASONIC, 300 MM SYSTEM, NRTL COMPLIANT

Parts used in Reflexion LK cleaner only

 0190-08582 800W RF GENERATOR, MEGASONIC CLEANER 300MM
Picture
0190-77344 TRANSDUCER PLATE NO DRAIN OPTION 200MM MEGASONIC
Picture
0190-77349 TRANSDUCER PLATE, 300MM
As part of continuous improvement, the 300mm transducer plate has been modified.

Two white squares were added to hold the wires for safer installation. ​
Picture
0190-25073 TRANSDUCER PLATE, 300MM

On Sale

On Sale

3970-00030 DRIVE REDUCER 10:1 GEAR HEAD 200 MM MIRRA SST

SGD4,670.00 SGD3,750.00
3970-00030 DRIVE REDUCER 10:1 GEAR HEAD 200 MM MIRRA SST

Condition : New
​
Product used in Applied Materials (AMAT) CMP Mirra Polisher Platen Motor.

Since 2003, AMAT has selected Stober gearboxes as the default gearbox configured on all AMAT CMP equipment. With over 80 years of gearing experience, Stober is the gold standard.
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On Sale

On Sale

0190-25073 TRANSDUCER PLATE, 300MM

SGD15,390.00 SGD12,310.00
0190-25073 TRANSDUCER PLATE, 300MM

Condition : New
​
Product used in Applied Materials (AMAT) CMP Reflexion and Reflexion Cleaner Megasonic Module.

An upgrade to 0190-77349 TRANSDUCER PLATE, 300MM, this transducer plate has two white squares added to hold connection wires more securely.
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